New AMC and Epi Monitors for Semiconductor Manufacturers

Three New Products Showcased at SEMICON West

With the shift to lower deposition temperatures and pressures, moisture has become the main culprit in oxide defects. The HALO QRP, developed for manufacturers using Low-temperature Epitaxy (LT-Epi), can monitor each process step and report real-time moisture concentration to the tool control system.

Tiger Optics also has specialized in addressing the demanding challenges of continuous AMC monitoring for semiconductor fabrication. Based on Tiger's new global platform, the T-I Max line excels in detecting ppt levels of the three most damaging contaminants in cleanrooms: HCl, HF, and NH3.

At SEMICON West, Tiger Optics also unveiled its redesigned mobile cart to package its analyzers for cleanroom environments. The GO-cart can easily accommodate up to four T-I Max analyzers. Small, light, yet sturdy, the cart also provides great convenience and control with the top-mounted central touchscreen.

Improved Formaldehyde Detection

HALO 3 CH2O now with 2.5 ppb MDL

Detecting low-ppb levels of formaldehyde is extremely important for ensuring quality of hydrogen for fuel cell electric vehicles (FCEVs). Recognizing the stringent requirements for this application, Tiger Optics now offers improved detection limits for CH2O in N2 and H2, helping to ensure SAE J2719 or ISO 14687 compliance.

Get connected with Serani

Seamless Analyzer Communication

The Serani™ software from Tiger Optics allows remote monitoring of your HALO, Spark, ALOHA H2O, or Tiger-i analyzer. Use any Microsoft Windows® PC for real-time streaming of concentration and other key parameters.  Access the power of your analyzer via your network or serial connection!

Verify Your Analyzer is in Spec

In-Place Recertification

Tiger Optics' low-cost Remote Certification Process will verify your unit is as accurate and reliable as the day it was shipped from Tiger Optics, and provide you with a certificate attesting to the accuracy of your unit.

The New Spark Methane

Trace CH4 Detection at a Popular Price

The Spark CH4 extends Tiger’s cost-efficient CRDS platform to the detection of trace methane for a host of applications, from process control to quality and safety assurance in air separation plants. With sensitivity as low as 6 ppb, the Spark CH4 replaces cumbersome mid-20th-century technology. 



Measuring H2O and HF Impurities in NF3 Gas

Nitrogen Fluoride (NF3) has several important industrial uses today, including manufacturing of semiconductor chips, flat panel displays, and solar cells. With increasing demand for LED / OLED displays, the global market for NF3 is expected to continue to soar over the next several years.

In the electronics industry, the main use for NF3 gas is for cleaning process chambers in the manufacturing of silicon chips. The benefits of using NF3 compared to other cleaning agents include safety, stability at room temperature, ease of handling, and lower greenhouse gas emissions than its predecessors.

Tiger Optics HALO product family can detect down to single-digit parts-per-billion (ppb) levels of H2O and HF in NF3, guaranteeing product purity for the end-users. The main advantages of Tiger’s CRDS over incumbent technologies like FTIR, for this application, are:

  • Significantly lower gas consumption
  • Excellent accuracy
  • Long term stability
  • Ease of use


Measuring Ammonia and Moisture in Nitrous Oxide

Nitrous Oxide (N2O) is commonly used in semiconductor manufacturing for the diffusion and deposition processes, where the purity requirement for semiconductor grade N2O is typically greater than 99.999%. Due to chemical reactivity, ammonia (NH3) and moisture (H2O) are two of the most critical impurities to control in the N2O product. To ensure sufficient product purity for end-users, gas manufacturers must monitor these contaminants to ensure their concentrations are below sub parts-per-million (ppm) levels.

Tiger Optics’ HALO analyzers are the perfect solution for trace NH3 and H2O analysis in N2O product. They are ideally suited for ppb-to-ppm range measurements, with extremely fast response time (T90 < 3 minutes). The calibration-free advantage of Tiger analyzers also significantly decreases maintenance cost and total Cost-of-Ownership. Please visit our website or contact us for more information.


Leading Labs Turn to Tiger

Tiger Optics is a standard bearer in a growing number of national metrology institutes around the globe. Since its first sale to the Dutch VSL in May, 2001, Tiger has gained acceptance at 22 national metrology institutes. Many of the institutes use Tiger instruments as a transfer standard to calibrate their own gas standards for research and industrial use. Some institutes also employ Tiger analyzers in their research of such problems as acid rain and global warming. Prized for their proven precision, excellent repeatability, and rapid throughput, as well as their extraordinary dynamic range (four+ orders of magnitude), Tiger’s CW-CRDS analyzers serve foremost institutes in these nations.