The MTO-1000-CH₄ series lend themselves to a myriad of applications including:

Semiconductor fabrication. As chip geometries continue to shrink and line widths narrow, methane contamination becomes a more critical issue, given its negative impact on production yields.

Semiconductor tools. Hydrocarbons have a detrimental effect on such semiconductor wafer processes as interconnect and photolithography. In lithography, for example, if hydrocarbons contaminate the purge gases used to reduce lens hazing and condensation, they can significantly hinder transmittance.

Specialty gas production. Since the MTO employs a non-contact measurement technique (only the light "touches" the gas), methane concentrations can now be quantified in many corrosive and reactive gases.

Ultra-high-purity gas production. UHP gas production requires reliable instruments to quickly and repeatably measure trace levels of methane in production runs. Sluggish and unreliable analytical equipment equals lost revenue opportunities. The MTO-1000 provides response time at the "speed of light". Since there are neither consumables nor need for calibration, downtime is minimized, which translates into enhanced plant utilization.

Component and system testing. With its accuracy, millisecond response, and four-line capability, the MTO helps to expedite qualification of systems, components, and tools. It verifies purifier performance; helps correlate methane content and product yield; and checks the validity of other instruments, such as APIMS.