|
|
WHEN
VERSATILITY IS A MATTER OF SURVIVAL
The MTO-1000 series lend themselves to a myriad of applications including:
Semiconductor
fabrication. As chip geometries continue to shrink and line widths narrow, moisture
contamination becomes a more critical issue, given its negative impact on production yields.
Thus, the requirement for superior gas quality has driven specifications to stringent levels of
1 ppb and below. The MTO meets and exceeds this challenge.
Specialty
gas production. Since the MTO employs a non-contact measurement technique (only the light
"touches" the gas), moisture concentrations can now be quantified in a variety of previously
elusive corrosive and reactive gases.
Ultra-high-purity
gas production. UHP gas production requires reliable instruments to quickly and repeatably
measure trace levels of moisture in production runs. Sluggish and unreliable analytical
equipment equals lost revenue opportunities. The MTO-1000 provides response time at the
"speed of light". Since there are neither consumables nor need for calibration, downtime
is minimized, which translates into enhanced plant utilization.
Laboratory
research and calibration. Fostered by national labs, Cavity Ring-Down Spectroscopy provides
a reliable, repeatable, and absolute means to calibrate moisture content, as well as to conduct
advanced research. The MTO-1000 represents a practical tool for challenging endeavors.
Component and
system testing. With its accuracy, millisecond response, and four-line capability, the MTO
helps to expedite qualification of systems, components, and tools. It verifies purifier performance,
helps correlate moisture content and product yield, and checks the validity of other instruments,
such as APIMS.
Other
applications. Unique applications and circumstances can necessitate ppm to ppt moisture
analysis in various industries, including pharmaceuticals, electric power, refrigeration,
aerospace, chemicals and petrochemicals, and natural gas processing and transmission.
|