|
SPECIFICATIONS
|
A.
GAS SAMPLE CONDITIONS |
|
Sample Inlet Pressure:
|
0 - 100 (psig) |
|
Flow
Rate:
|
Up to 500 sccm |
|
Sample
Gases:
|
Ammonia (NH3), Phosphine (PH3), Arsine ( AsH3), and Inert |
|
Sample
Line Temperature:
|
Up to 60°C |
B.
GAS FLOW RATE |
| Materials
of Construction: |
316L
stainless steel (optional Hastelloy®) |
| Wetted
Components: |
10
Ra surface finish |
| Gas
Connection: |
Sample
inlets & outlets - 1/4" VCR™ |
| Leak
Tested to: |
<2
x 10-8 mbar • l /sec |
C.
ELECTRICAL |
| Alarm
Indicators: |
User-programmable
alarm set points |
|
Power Requirements:
|
90-240
VAC 50/60 Hz |
|
Power
Consumption:
|
200
Watts max. |
|
Output
Signals:
|
|
|
Recorder
|
Isolated 4-20mA or 0-20 mA output per sample inlet
|
|
Alarm
|
Form-C
relay per sample inlet |
|
|
Form-C relay for system fault |
|
|
(Laser status & ring-down status)
|
|
User
Interface:
|
10.4"
color VGA display with touch screen, PS2 Mouse
and
Keyboard connection, 10BaseT Ethernet, 3.5" USB, RS-232
|
D.
DIMENSIONS |
|
Mounting:
|
14" x 19" x 29" (H x W x D) |
|
Weight:
|
100 pounds |
PERFORMANCE
|
|
Lowest
Detection Limit:
|
8 ppb (in hydride), 0.5 ppb (in inert) |
|
Sensitivity
|
5 ppb (in hydride), 0.3 ppb (in inert) |
|
Accuracy (greater of)
|
4% of reading or +/- 5 ppb |
|
Speed
of Response (typical):
|
Response to 50 ppb intrusion - less than one minute
|
| Operating
Range: |
0 - 8 ppm (in hydride), 0 - 5 ppm (in inert) |
| Environmental
Conditions: |
10° - 40° C |
| Storage
Temperature: |
-10° - 50° C |
TECHNOLOGY
|
|
Approvals:
|
CE: LVD & EMC approved |
|
Method:
|
Cavity
Ring-Down Spectroscopy |
| Patents:
|
U.S.
Patent # 5,528,040 |
|
|
Other patents pending |
