Tiger Optics LaserTrace™ Measures Moisture
in Low-Temperature Silicon Germanium Epitaxial Process

Warrington, PA (October 2004) – The advent of low-temperature epitaxy offers powerful benefits to semiconductor fabricators. But it also exposes opportunities for moisture contamination. The ability to measure trace moisture in aggressive background gases, such as hydrogen chloride (HCl) and chlorine (Cl2) is paramount to preventing wafer defects in the new generation of germaine (SiGe) epitaxial films.

The LaserTrace accurately detects parts-per-billion (ppb) levels of moisture in corrosive gas streams, measures multiple gases simultaneously with its remote sensors, and offers a wide dynamic range, from ppbs to ppms. Based on a powerful, proven technology known as Cavity Ring-Down Spectroscopy (CRDS) it provides a fast, accurate, and easy-to-use means to detect contaminants and requires no calibration.

With its split-architecture design, the LaserTrace allows simultaneous monitoring of up to four points on the EPI tool. Although moisture is the primary contaminant measured, the LaserTrace is capable of measuring oxygen and many other contaminants.

About Tiger Optics
Tiger Optics, LLC, headquartered in Warrington, PA, is the leader in electro-optic measurement technology based on Cavity Ring-Down Spectroscopy. The company researches, engineers, and manufactures equipment for semiconductor fabrication, laboratory calibration; specialty gases and chemicals; and environmental trace species detection. Tiger Optics offers complete sales and service support worldwide, with 45 sales representatives spanning the United States, Europe, and Asia. For more information, visit www.tigeroptics.com

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Media contact:
Lisa Bergson, Tiger Optics, LLC.
Lbergson@tigeroptics.com 215-343-6600