The LaserTrace™ serves a variety of applications including:

Semiconductor fabrication. Given its negative impact on production yield, molecular contamination becomes more and more critical, as chip geometries continue to shrink and line widths narrow. The requirement for superior gas quality has driven specifications to stringent levels of 1 ppb and below. With an LDL as low as 200 ppt and millisecond response time, the LaserTrace™ is comfortably within range.

Semiconductor tools and carts. Robust and flexible, the LaserTrace™ lends itself to mobile and in-situ applications. It can be readily configured for PVD, CVD, and etch process tools for thin film process monitoring.

Specialty gas production. Since the LaserTrace™ employs a non-contact measurement technique (only the light shines through the gas), contaminants can now be quantified in many corrosive and reactive gases, including hydrogen chloride hydrogen bromide, and chlorine.

Ultra-high-purity gas production. UHP gas production requires reliable instruments to quickly measure trace levels of contaminants in production runs. The LaserTrace™ provides response time at the "speed of light". Since there are neither consumables nor need for calibration, downtime is minimized, which translates into enhanced plant utilization.

Other applications. Unique applications and circumstances can necessitate ppm to ppt analysis in various industries and applications, including automotive emissions, medical diagnostics, refrigeration, aerospace, chemicals and petrochemicals, natural gas processing and transmission, Homeland Security (i.e. toxic gases and chemical warfare), environmental monitoring, gas purifier production and qualification, UHP gas pipeline installation and qualification, and electric and nuclear power plants.