Airborne Molecular Contaminants

Applications

Tiger-i analyzers measure trace gases in ambient air. Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop. Tiger-i analyzers monitor critical AMCs, such as HCl, HF, and NH3, in cleanroom environments and front-opening unified pods (FOUPs) throughout the fab. Tiger CRDS technique makes measurements easy and is free of interferences from O3 and other contaminants.

Monitors available as:

  • Standalone
  • Rack-mounted AMC Combo (HCl/HF, HCl/NH3 or HF/NH3)
  • AMC Mobile Cart (with up to four analyzers)

Select applications include:

Monitoring of Cleanroom Air Front Opening Unified Pods (FOUPs)