Tiger's Tale Quarterly Newsletter 2016 Winter

April 19, 2017

Dopants and Specialty Gases are widely used in deposition processes in the semiconductor and solar industries. To save on transport fees, leading fabs in Asia are moving towards blending Germane at their locations, requiring on-site analysis. Our CRDS analyzers, with cost-saving low flow rates and fast speed of response, are ideal for moisture analysis in Arsine (AsH3), Phosphine (PH3), Ammonia (NH3) as pure gases, and mixture gases containing Germane (GeH4) and Phosphine (PH3) with Hydrogen (H2).