HALO 3 HF

Trace hydrogen fluoride in pressurized gases

Applications

  • Gas Quality Control
  • Gaseous CRMs & Calibration Gas Mixtures
  • High-Purity Gases & Systems
  • Research & Development
Detection and Matrix Range LDL Sensitivity
HF in N20 – 5 ppm0.5 ppb0.4 ppb
HF in SF60 – 8 ppm1.5 ppb1.2 ppb
HF in NF30 – 7.5 ppm0.75 ppb0.6 ppb
HF in CF40 – 6 ppm1.0 ppb0.8 ppb
HF in C2F60 – 12 ppm2.0 ppb1.6 ppb
HF in C3F80 – 12 ppm2.0 ppb1.6 ppb
HF in C4F60 – 15 ppm20 ppb15 ppb
HF in C4F80 – 14 ppm2.0 ppb1.6 ppb
Performance
Operating range See Detection Capability table
Detection limit (LDL, 24 h peak-to-peak) See Detection Capability table
Sensitivity (3σ) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of Sensitivity
Accuracy (greater of) ± 4% or 1/2 of LDL
Speed of response < 1 minute to 90%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate Up to 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73" x 19" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232
  802.11g Wireless (optional), Modbus TCP (optional)
Patents
U.S. Patent #7,277,177  
Title / Description

HALO 3 HF Brochure (PDF)

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