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HALO KA H2O

Part-per-trillion detection limits for H2O

HALO KA H<sub>2</sub>O
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An analytical solution that’s right on time

The HALO KA H2O packs a punch in one all-included compact and affordable package. Using Tiger Optics’ renowned time-based technology—Continuous Wave Cavity Ring-Down Spectroscopy—you can verify moisture impurity levels down to 200 ppt in helium, with drift-free stability and virtually instant response. You’ll find our system exceptionally fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA H2O specializes in trace-level moisture detection in bulk gases and specialty gases, as well as gas mixtures, including germane (GeH4) in hydrogen and other specialty mixtures used in semiconductor manufacturing. Pair the HALO KA H2O with the HALO OK for pptlevel oxygen measurement to enjoy the benefits of laser-based technology for both of these critical contaminants.

Compact, affordable and powerful, the HALO KA H2O brings you:

  • Parts per trillion (ppt) moisture detection capability in an array of gases
  • Small footprint (two HALO KAs fit in a 19” rack)
  • Absolute measurement (freedom from calibration)
  • Low cost of ownership and great ease of use
  • Wide dynamic range—over four orders of magnitude
  • Clean technology

Applications

  • High-Purity Gases & Systems
  • Research & Development
Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ)
H2O in N20 – 20 ppm400 ppt300 ppt
H2O in He0 – 4 ppm200 ppt60 ppt
H2O in Ar0 – 9 ppm200 ppt130 ppt
H2O in H20 – 16 ppm300 ppt200 ppt
H2O in O20 – 10 ppm200 ppt150 ppt
H2O in Clean Dry Air (CDA)0 – 18 ppm400 ppt300 ppt
H2O in CO0 – 24 ppm700 ppt600 ppt
H2O in CO20 – 25 ppm1000 ppt800 ppt
H2O in 1% GeH4/99% H20 – 16 ppm10 ppb7 ppb
H2O in 10% GeH4/90% H20 – 16 ppm50 ppb35 ppb
H2O in COS0 – 23 ppm5 ppb4 ppb
H2O in Ne0 – 5 ppm200 ppt80 ppt
H2O in Kr0 – 11 ppm200 ppt160 ppt
H2O in Xe0 – 13 ppm300 ppt250 ppt
H2O in Cl20 – 25 ppm
(corrosion-resistant material recommended)		750 ppt650 ppt
H2O in HCl0 – 50 ppm
(corrosion-resistant material recommended)		1.5 ppb1.2 ppb
H2O in HBr0 – 50 ppm
(corrosion-resistant material required)		15 ppb12 ppb
H2O in SF60 – 15 ppm500 ppt400 ppt
H2O in NF30 – 20 ppm750 ppt600 ppt
H2O in CF40 – 15 ppm1000 ppt800 ppt
H2O in C2F60 – 15 ppm1.5 ppb1.2 ppb
H2O in C3F80 – 20 ppm1.5 ppb1.2 ppb
H2O in C4F80 – 20 ppm1.5 ppb1.2 ppb
H2O in C5F80 – 32 ppm10 ppb8 ppb
Performance
Operating range See Detection Capability table
Detection limit (LDL, 24 h peak-to-peak) See Detection Capability table
Sensitivity (3σ) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of Sensitivity
Accuracy (greater of) ± 4% or 1/2 of LDL
Speed of response < 3 minutes to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316L stainless steel (optional Hastelloy®), 10 Ra surface finish
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate 0.05 – 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232
  802.11g Wireless (optional), Modbus TCP (optional)
Certification CE Mark
Patents
U.S. Patent #7,277,177  
Title / Description

HALO KA H2O Brochure (PDF)

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Tiger Optics Takes on the Servomex DF-749

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Moisture Measurement Best Practices Review

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