HALO KA H2O
Part-per-trillion detection limits for H2O
An analytical solution that’s right on time
The HALO KA H2O packs a punch in one all-included compact and affordable package. Using Tiger Optics’ renowned time-based technology—Continuous Wave Cavity Ring-Down Spectroscopy—you can verify moisture impurity levels down to 100 ppt in helium, with drift-free stability and virtually instant response. You’ll find our system exceptionally fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA H2O specializes in trace-level moisture detection in bulk gases and specialty gases, as well as gas mixtures, including germane (GeH4) in hydrogen and other specialty mixtures used in semiconductor manufacturing. Pair the HALO KA H2O with the HALO OK for ppt level oxygen measurement to enjoy the benefits of laser-based technology for both of these critical contaminants.
Compact, affordable and powerful, the HALO KA H2O brings you:
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Small footprint (two HALO KAs fit in a 19” rack)
- Absolute measurement (freedom from calibration)
- Low cost of ownership and great ease of use
- Wide dynamic range—over four orders of magnitude
- Clean technology
Applications
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| H2O in N2 | 0 – 20 ppm | 300 ppt | 100 ppt |
| H2O in He | 0 – 4 ppm | 100 ppt | 20 ppt |
| H2O in Ar | 0 – 9 ppm | 130 ppt | 45 ppt |
| H2O in H2 | 0 – 16 ppm | 200 ppt | 70 ppt |
| H2O in O2 | 0 – 10 ppm | 150 ppt | 50 ppt |
| H2O in Clean Dry Air (CDA) | 0 – 18 ppm | 300 ppt | 100 ppt |
| H2O in CO | 0 – 24 ppm | 600 ppt | 200 ppt |
| H2O in CO2 | 0 – 25 ppm | 800 ppt | 300 ppt |
| H2O in 1% GeH4/99% H2 | 0 – 16 ppm | 7 ppb | 2.5 ppb |
| H2O in 10% GeH4/90% H2 | 0 – 16 ppm | 35 ppb | 12 ppb |
| H2O in COS | 0 – 23 ppm | 4 ppb | 1.4 ppb |
| H2O in Ne | 0 – 5 ppm | 100 ppt | 30 ppt |
| H2O in Kr | 0 – 11 ppm | 160 ppt | 60 ppt |
| H2O in Xe | 0 – 13 ppm | 250 ppt | 90 ppt |
| H2O in Cl2 | 0 – 25 ppm (corrosion-resistant material recommended) | 650 ppt | 220 ppt |
| H2O in HCl | 0 – 50 ppm (corrosion-resistant material recommended) | 1200 ppt | 400 ppt |
| H2O in HBr | 0 – 50 ppm (corrosion-resistant material required) | 12 ppb | 4 ppb |
| H2O in SF6 | 0 – 15 ppm | 400 ppt | 140 ppt |
| H2O in NF3 | 0 – 20 ppm | 600 ppt | 200 ppt |
| H2O in CF4 | 0 – 15 ppm | 800 ppt | 300 ppt |
| H2O in C2F6 | 0 – 15 ppm | 1200 ppt | 400 ppt |
| H2O in C3F8 | 0 – 20 ppm | 1200 ppt | 400 ppt |
| H2O in C4F8 | 0 – 20 ppm | 1200 ppt | 400 ppt |
| H2O in C5F8 | 0 – 32 ppm | 8 ppb | 3 ppb |
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 3 minutes to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | 0.05 – 1.8 slpm |
| Sample gases | Most inert, toxic, passive and corrosive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical | |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA per sensor |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232 |
| 802.11g Wireless (optional), Modbus TCP (optional) | |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |