Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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HALO Specification Summary

Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2O in N2O
Trace moisture analyzer for pure nitrous oxide
H2O in N2 0 – 20 ppm 3 ppb 2.2 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
H2O in N2O 0 – 20 ppm 10 ppb 7.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO LP H2O
Trace moisture in hydride gases
H2O in NH3 0 – 20 ppm 12 ppb 9 ppb ± 4% or ½ LDL ± 1% or 1/3 of Sensitivity up to 1.0 slpm 10 – 125 psig
H2O in PH3 0 – 10 ppm 12 ppb 9 ppb
H2O in N2 0 – 20 ppm 1.4 ppb 1.0 ppb
H2O in Ar 0 – 4 ppm 1.4 ppb 1.0 ppb
H2O in H2 0 – 6 ppm 1.0 ppb 0.8 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.8 ppb
H2O in NO 0 – 100 ppm 20 ppb 16 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO RP H2O
Trace moisture for sub-atmospheric pressure (as low as 50 Torr)
H2O in H2 0 – 20 ppm 3.5 ppb 2.8 ppb ± 4% or ½ LDL ± 1% or ⅓ sensitivity up to 1.0 slpm 50 Torr – 15 psig
H2O in N2 0 – 20 ppm 3.5 ppb 2.8 ppb
H2O in Ar 0 – 20 ppm 2.0 ppb 1.6 ppb
H2O in He 0 – 12 ppm 1.0 ppb 0.8 ppb
H2O in HCl
(may require Hastelloy®)
0 – 25 ppm 4.0 ppb 3.2 ppb
Product Detection
(Matrix independent)
Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO QRP
Moisture monitor for low-pressure chambers (down to 1 Torr)
H2O 0 – 12 mTorrpp
(1200 ppm @ 10 Torr)
1 μTorrpp
(see chart for ppb units)
0.7 μTorrpp
(see chart for ppb units)
± 5% or ½ LDL ± 1% or ⅓ sensitivity N/A 1 Torr – 100 Torr
(1 Torr – 1000 Torr optional)
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Spark H2O in CO2
Trace moisture detection in pure CO2

H2O in CO2 0 – 600 ppm 750 ppb 550 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity ∼1.4 slpm 10 – 125 psig
H2O in N2 0 – 500 ppm 10 ppb 7.5 ppb
H2O in O2 0 – 250 ppm 10 ppb 7.5 ppb
H2O in Ar 0 – 200 ppm 8 ppb 6 ppb
H2O in He 0 – 125 ppm 5 ppb 4 ppb
H2O in H2 0 – 400 ppm 8 ppb 6 ppb
H2O in Clean Dry Air (CDA) 0 – 450 ppm 10 ppb 7.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Spark+ H2O
Trace moisture detection as low as 3 ppb

H2O in N2 0 – 2000 ppm 10 ppb 7.5 ppb ± 3% or the LDL ± 0.5% or ⅓ Sensitivity ≤1.4 slpm
(gas dependent)
10 – 125 psig
H2O in O2 0 – 1000 ppm 5 ppb 4 ppb
H2O in Ar 0 – 900 ppm 4 ppb 3 ppb
H2O in He 0 – 450 ppm 3 ppb 2 ppb
H2O in H2 0 – 1750 ppm 7 ppb 5 ppb
H2O in Clean Dry Air (CDA) 0 – 1800 ppm 10 ppb 7.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 3 H2O
Ultimate performance for ppt-level moisture detection
H2O in N2 0 – 5 ppm 250 ppt 200 ppt ± 3% or ½ LDL ± 0.75% or ⅓ of Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
H2O in He 0 – 1 ppm 100 ppt 50 ppt
H2O in Ar 0 – 2 ppm 110 ppt 90 ppt
H2O in H2 0 – 4 ppm 180 ppt 150 ppt
H2O in O2 0 – 2.5 ppm 130 ppt 100 ppt
H2O in CO2 0 – 10 ppm 1000 ppt 400 ppt
Product Detection and Matrix Range LDL (3σ) LDL (peak-to-peak) Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i 2000 HCl
Monitor for Ambient Molecular Contaminants (AMCs)
HCl in Ambient Air 0 – 4 ppm 0.75 ppb 1.0 ppb ± 4% or the LDL ± 0.75% or ⅓ LDL ∼1 slpm 0 – 15 psig
HCl in Clean Dry Air (CDA) 0 – 4 ppm 0.75 ppb 1.0 ppb
HCl in N2 0 – 4 ppm 0.75 ppb 1.0 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
CO-rekt
Measuring CO, CO2, CH4 or H2O in NEMA-rated enclosure
CO in H2 0 − 2000 ppm 100 ppb 70 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm
(gas dependent)
10 – 125 psig
CO2 in H2 (low range) 0 − 12 ppm 10 ppb 7 ppb
CO2 in H2 (high range) 0 − 1500 ppm 600 ppb 500 ppb
H2O in H2 (low range) 0 − 16 ppm 1.2 ppb 1.0 ppb
H2O in H2 (high range) 0 − 400 ppm 8 ppb 6 ppb
CH4 in H2 (low range) 0 − 8 ppm 2.0 ppb 1.6 ppb
CH4 in H2 (high range) 0 − 100 ppm 10 ppb 7 ppb
Product Detection and Matrix Range LDL (3σ) LDL (peak-to-peak) Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i 2000 HF
Monitor for Airborne Molecular Contaminants (AMCs)
HF in Ambient Air 0 – 1 ppm 0.15 ppb 0.2 ppb ± 4% or the LDL ± 0.75% or ⅓ LDL ∼1 slpm 0 – 15 psig
HF in Clean Dry Air (CDA) 0 – 1 ppm 0.15 ppb 0.2 ppb
HF in N2 0 – 1 ppm 0.15 ppb 0.2 ppb
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 NH3
Trace-level ammonia
NH3 in N2 0 – 7 ppm 0.5 ppb 0.4 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity ∼1 slpm 10 – 125 psig
NH3 in H2 0 – 6 ppm 0.4 ppb 0.3 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2
ppb-level hydrogen detection
H2 in N2 0 – 500 ppm 10 ppb 8 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.5 slpm (± 20%) 10 – 125 psig (sample)
20 – 125 psig (Utility gas)
H2 in Ar 0 – 200 ppm 8 ppb 6 ppb
H2 in He 0 – 125 ppm 5 ppb 4 ppb
H2 in O2 0 – 250 ppm 50 ppb 4 ppb
H2 in Clean Dry Air (CDA) 0 – 450 ppm 50 ppb 7 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
ALOHA H2O
10 ppb H2O detection in ultra-pure ammonia

H2O in NH3 0 – 20 ppm 10 ppb 8 ppb ± 4% or ½ of LDL N/A up to 1.8 slpm 10 – 125 psig (1.7 – 9.6 bar)
H2O in N2 0 – 6 ppm 1.4 ppb 1.0 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i 2000 CH4
Methane analyzer for greenhouse gas detection and monitoring
CH4 in Clean Dry Air (CDA) (low range) 0 – 20 ppm 2.0 ppb 1.5 ppb ± 4% or the LDL
(∼80 ppb at ambient CH4 levels)
± 0.75% or ⅓ Sensitivity
(∼15 ppb at ambient CH4 levels)
∼1 slpm 0 – 15 psig
CH4 in Clean Dry Air (CDA) (high range) 0 – 100 ppm 10 ppb 7.5 ppb
CH4 in N2 (low range) 0 – 20 ppm 2.0 ppb 1.5 ppb
CH4 in N2 (high range) 0 – 100 ppm 10 ppb 7.5 ppb
CH4 in Ambient Air (low range) 0 – 25 ppm See Resources Brochure See Resources Brochure
CH4 in Ambient Air (high range) 0 – 100 ppm See Resources Brochure See Resources Brochure
Upper range as high as 1000 ppm available on request
Product Detection and Matrix Range LDL (3σ) LDL (peak-to-peak) Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i 2000 NH3
Monitor for Ambient Molecular Contaminants (AMCs)
NH3 in Ambient Air 0 – 40 ppm 2.5 ppb 3.5 ppb ± 4% or the LDL ± 0.75% or ⅓ LDL ∼1 slpm 0 – 15 psig
NH3 in Clean Dry Air (CDA) 0 – 40 ppm 2.5 ppb 3.5 ppb
NH3 in N2 0 – 40 ppm 2.5 ppb 3.5 ppb
LDL achievable with humidity
variation of less than 7% RH
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 2.5 H2O
High-performance ppt-level moisture detection
H2O in N2 0 – 5 ppm 500 ppt 400 ppt ± 4% or ½ LDL ± 0.75% or ⅓ of Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
H2O in He 0 – 1 ppm 200 ppt 100 ppt
H2O in Ar 0 – 2 ppm 220 ppt 180 ppt
H2O in H2 0 – 4 ppm 400 ppt 300 ppt
H2O in O2 0 – 2.5 ppm 250 ppt 200 ppt
H2O in CO2 0 – 10 ppm 1000 ppt 800 ppt
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA H2O
Part-per-trillion detection limits for H2O

H2O in N2 0 – 20 ppm 400 ppt 300 ppt ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 200 ppt 60 ppt
H2O in Ar 0 – 9 ppm 200 ppt 130 ppt
H2O in H2 0 – 16 ppm 300 ppt 200 ppt
H2O in O2 0 – 10 ppm 200 ppt 150 ppt
H2O in Clean Dry Air (CDA) 0 – 18 ppm 400 ppt 300 ppt
H2O in CO 0 – 24 ppm 700 ppt 600 ppt
H2O in CO2 0 – 25 ppm 1000 ppt 800 ppt
H2O in 1% GeH4/99% H2 0 – 16 ppm 10 ppb 7 ppb
H2O in 10% GeH4/90% H2 0 – 16 ppm 50 ppb 35 ppb
H2O in COS 0 – 23 ppm 5 ppb 4 ppb
H2O in Ne 0 – 5 ppm 200 ppt 80 ppt
H2O in Kr 0 – 11 ppm 200 ppt 160 ppt
H2O in Xe 0 – 13 ppm 300 ppt 250 ppt
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
750 ppt 650 ppt
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
1.5 ppb 1.2 ppb
H2O in HBr 0 – 50 ppm
(corrosion-resistant material required)
15 ppb 12 ppb
H2O in SF6 0 – 15 ppm 500 ppt 400 ppt
H2O in NF3 0 – 20 ppm 750 ppt 600 ppt
H2O in CF4 0 – 15 ppm 1000 ppt 800 ppt
H2O in C2F6 0 – 15 ppm 1.5 ppb 1.2 ppb
H2O in C3F8 0 – 20 ppm 1.5 ppb 1.2 ppb
H2O in C4F8 0 – 20 ppm 1.5 ppb 1.2 ppb
H2O in C5F8 0 – 32 ppm 10 ppb 8 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 3 CH4
Sub-ppb-level methane detection
CH4 in N2 0 – 8 ppm 1.0 ppb 0.8 ppb ± 3% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.9 – 3.9 slpm
(gas dependent)
30 – 125 psig
CH4 in He 0 – 5 ppm 0.7 ppb 0.5 ppb
CH4 in Ar 0 – 7 ppm 0.9 ppb 0.7 ppb
CH4 in H2 0 – 8 ppm 1.0 ppb 0.8 ppb
CH4 in O2 0 – 5 ppm 0.7 ppb 0.5 ppb
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 H2O
Trace moisture analyzer for ultra-high-purity gases

H2O in N2 0 – 20 ppm 1.5 ppb 1.2 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 0.3 ppb 0.25 ppb
H2O in Ar 0 – 9 ppm 0.7 ppb 0.6 ppb
H2O in H2 0 – 16 ppm 1.2 ppb 1.0 ppb
H2O in O2 0 – 12 ppm 0.9 ppb 0.7 ppb
H2O in Clean Dry Air (CDA) 0 – 18 ppm 1.5 ppb 1.2 ppb
H2O in CO 0 – 24 ppm 2.0 ppb 1.5 ppb
H2O in CO2 0 – 25 ppm 2.5 ppb 2.0 ppb
H2O in COS 0 – 23 ppm 15 ppb 12 ppb
H2O in Ne 0 – 5 ppm 0.4 ppb 0.3 ppb
H2O in Kr 0 – 11 ppm 0.8 ppb 0.6 ppb
H2O in Xe 0 – 13 ppm 1.0 ppb 0.8 ppb
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
2.0 ppb 1.5 ppb
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
4.5 ppb 3 ppb
H2O in HBr 0 – 100 ppm
(corrosion-resistant material required)
15 ppb 12 ppb
H2O in SF6 0 – 15 ppm 1.2 ppb 1.0 ppb
H2O in NF3 0 – 20 ppm 3 ppb 2.5 ppb
H2O in CF4 0 – 15 ppm 5 ppb 4 ppb
H2O in C2F6 0 – 15 ppm 4 ppb 3 ppb
H2O in C3F8 0 – 20 ppm 4 ppb 3 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH4
Trace methane analyzer for high-purity gases

CH4 in N2 0 – 8 ppm 2.0 ppb 1.6 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 30 – 125 psig
CH4 in He 0 – 5 ppm 1.3 ppb 1.1 ppb
CH4 in Ar 0 – 7 ppm 1.7 ppb 1.4 ppb
CH4 in H2 0 – 8 ppm 2.0 ppb 1.6 ppb
CH4 in O2 0 – 6 ppm 1.4 ppb 1.1 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO2
Part-per-billion carbon dioxide detection

CO2 in N2 (low range) 0 – 12 ppm 10 ppb 7 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
CO2 in N2 (high range) 0 – 1500 ppm 300 ppb 250 ppb
Product Detection and Matrix Range LDL (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
Spark CO2
Trace-level carbon dioxide detection

CO2 in N2 0 – 1500 ppm 250 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity ≤1.4 slpm
(in N2)
10 – 125 psig
CO2 in Clean Dry Air (CDA) 0 – 1500 ppm 250 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i 2000 CO2
CO2 analyzer for greenhouse gas monitoring
CO2 in Clean Dry Air (CDA) 0 – 3000 ppm 200 ppb 150 ppb ± 4% or the LDL
(∼16 ppm at ambient CO2 levels)
± 0.75% or ⅓ Sensitivity
(∼3 ppm at ambient CO2 levels)
∼1 slpm 0 – 15 psig
CO2 in N2 0 – 3000 ppm 200 ppb 150 ppb
CO2 in Ambient Air 0 – 1500 ppm N/A N/A
Product Analyzer Series/Family Compatible Models Accuracy (greater of) Precision (greater of) Flow rate Pressure
Serani
Analyzer Interface Software
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 N2O
Sub-ppm nitrous oxide detection in nitrogen
N2O in N2 0 – 1000 ppm 250 ppb 200 ppb ± 4% or ½ LDL ± 1% or 1/3 of Sensitivity up to 1.0 slpm 10 – 125 psig
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO
Trace-level carbon monoxide detection

CO in H2 0 – 2000 ppm 100 ppb 70 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
CO in N2 0 – 2000 ppm 100 ppb 70 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
ALOHA+ H2O
2 ppb H2O detection in ultra-pure ammonia
H2O in NH3 0 – 20 ppm 2.0 ppb 1.6 ppb ± 4% or LDL ± 1% or ⅓ sensitivity up to 1.8 slpm
(gas dependent)
10 – 125 psig
H2O in Ar 0 – 4 ppm 0.8 ppb 0.4 ppb
H2O in He 0 – 3 ppm 0.6 ppb 0.3 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Prismatic 2
Multi-species gas analyzer
CH4 in N2 or CDA 0 – 10 ppm 1.0 ppb 0.75 ppb ± 4% or ½ LDL ± 0.5% or ⅓ Sensitivity < 1 slpm
(gas dependent)
20 – 125 psig
NH3 in N2 or CDA 0 – 15 ppm 1.5 ppb 1.1 ppb
H2O in N2 or CDA 0 – 50 ppm 10 ppb 5 ppb
H2S in N2 or CDA 0 – 1000 ppm 50 ppb 40 ppb
CO in N2 or CDA 0 – 1000 ppm 150 ppb 100 ppb
CO2 in N2 or CDA 0 – 2000 ppm 200 ppb 150 ppb
CH4 in He 0 – 6 ppm 0.7 ppb 0.5 ppb
H2O in He 0 – 10 ppm 2.0 ppb 1.0 ppb
CO in He 0 – 800 ppm 130 ppb 90 ppb
CO2 in He 0 – 1600 ppm 170 ppb 130 ppb
CH4 in H2 0 – 10 ppm 1.0 ppb 0.75 ppb
NH3 in H2 0 – 6 ppm 1.0 ppb 0.8 ppb
H2O in H2 0 – 50 ppm 10 ppb 5 ppb
H2S in H2 0 – 1000 ppm 50 ppb 40 ppb
CO in H2 0 – 1200 ppm 180 ppb 120 ppb
CO2 in H2 0 – 3000 ppm 300 ppb 200 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i 2000 CH2O
Trace formaldehyde monitor for ambient air
CH2O in Ambient Air 0 – 200 ppm 100 ppb 75 ppb ± 4% or the LDL ± 0.75% or 1/3 Sensitivity ∼1 slpm 0 – 15 psig
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Spark H2O
Trace moisture detection as low as 4 ppb

H2O in N2 0 – 2000 ppm 15 ppb 12 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity ∼1.0 slpm
(in N2)
10 – 125 psig
H2O in O2 0 – 1000 ppm 7 ppb 6 ppb
H2O in Ar 0 – 900 ppm 6 ppb 4.5 ppb
H2O in He 0 – 450 ppm 4 ppb 3 ppb
H2O in H2 0 – 1750 ppm 10 ppb 7.5 ppb
H2O in Clean Dry Air (CDA) 0 – 1800 ppm 14 ppb 10 ppb
H2O in Ne 0 – 450 ppm 40 ppb 30 ppb
H2O in Kr 0 – 1100 ppm 7 ppb 5.5 ppb
H2O in Xe 0 – 1300 ppm 10 ppb 7.5 ppb
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3Q H2O
Sub-part-per-billion detection limits for H2O

H2O in N2 0 – 20 ppm 0.8 ppb 0.6 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 0.25 ppb 0.12 ppb
H2O in Ar 0 – 9 ppm 0.4 ppb 0.3 ppb
H2O in H2 0 – 16 ppm 0.6 ppb 0.4 ppb
H2O in O2 0 – 10 ppm 0.4 ppb 0.3 ppb
Product Model Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
Tiger-i CEM
Continuous Emissions Monitoring (CEM) for HCl, HF, NH3 and more
Tiger-i CEM NH3 0 – 40 ppm 8 ppb 6 ppb ± 4% or the LDL ± 0.75% or 1/3 Sensitivity ∼1 slpm 0 – 10 psig (HCl and HF)
0 – 15 psig (all others)
Tiger-i CEM HCl 0 – 4 ppm 1.0 ppb 0.75 ppb
Tiger-i CEM HF 0 – 1 ppm 0.2 ppb 0.15 ppb
Tiger-i CEM H2S 0 – 500 ppm 50 ppb 38 ppb
Tiger-i CEM CO 0 – 2000 ppm 100 ppb 75 ppb
Tiger-i CEM HCN 0 – 15 ppm 1.5 ppb 1.1 ppb
Tiger-i CEM CH4 0 – 20 ppm 2.0 ppb 1.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HF
Trace hydrogen fluoride in pressurized gases

HF in N2 0 – 5 ppm 0.5 ppb 0.4 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
HF in SF6 0 – 8 ppm 1.5 ppb 1.2 ppb
HF in NF3 0 – 7.5 ppm 0.75 ppb 0.6 ppb
HF in CF4 0 – 6 ppm 1.0 ppb 0.8 ppb
HF in C2F6 0 – 12 ppm 2.0 ppb 1.6 ppb
HF in C3F8 0 – 12 ppm 2.0 ppb 1.6 ppb
HF in C4F8 0 – 14 ppm 2.0 ppb 1.6 ppb
Product Detection and Matrix Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH2O
Trace-level formaldehyde
CH2O in N2 0 – 180 ppm 15 ppb 9 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity 1 slpm 10 – 125 psig
CH2O in H2 0 – 200 ppm 17 ppb 10 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
Spark CH4
Trace-level methane detection

CH4 in N2 0 – 80 ppm 10 ppb 7.5 ppb ± 4% or the LDL ± 0.75% or ⅓ Sensitivity ∼1.0 slpm
(in N2)
10 – 125 psig
CH4 in O2 0 – 50 ppm 7 ppb 6 ppb
CH4 in Ar 0 – 70 ppm 9 ppb 6.5 ppb
CH4 in He 0 – 50 ppm 7 ppb 6 ppb
CH4 in H2 0 – 80 ppm 10 ppb 7.5 ppb
CH4 in Clean Dry Air (CDA) 0 – 80 ppm 10 ppb 7.5 ppb
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HCl
Trace hydrogen chloride



HCl in N2 0 – 15 ppm 2.5 ppb* 1.7 ppb ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity up to 1.8 slpm 10 – 125 psig
HCl in Clean Dry Air (CDA) 0 – 15 ppm 2.5 ppb* 1.7 ppb
*with <2000ppm H2O in sample gas
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 3 O2
Ultimate performance for ppt-level oxygen detection
O2 in N2 0 – 2.5 ppm 125 ppt 100 ppt ± 3% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
O2 in He 0 – 0.5 ppm 50 ppt 25 ppt
O2 in Ar 0 – 1 ppm 55 ppt 45 ppt
O2 in H2 0 – 2 ppm 90 ppt 75 ppt
O2 in CO2 0 – 5 ppm 1000 ppt 200 ppt
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO OK
Trace oxygen detection as low as 100 ppt
O2 in He 0 – 0.5 ppm 100 ppt 50 ppt ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig (sample)
20 – 125 psig (H2 supply)
O2 in Ar 0 – 1 ppm 110 ppt 90 ppt
O2 in H2 0 – 2 ppm 200 ppt 150 ppt
O2 in N2 0 – 2.5 ppm 250 ppt 200 ppt
O2 in CO2§ 0 – 5 ppm 1000 ppt 400 ppt
§Special configuration required,
must be specified at time of order.
Product Detection and Matrix Range LDL Sensitivity Accuracy (greater of) Precision (greater of) Flow rate Pressure
LaserTrace 2.5 O2
High-performance ppt-level oxygen detection
O2 in N2 0 – 2.5 ppm 250 ppt 200 ppt ± 4% or ½ LDL ± 0.75% or ⅓ Sensitivity 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig
O2 in He 0 – 0.5 ppm 100 ppt 50 ppt
O2 in Ar 0 – 1 ppm 110 ppt 90 ppt
O2 in H2 0 – 2 ppm 180 ppt 150 ppt
O2 in CO2 0 – 5 ppm 1000 ppt 400 ppt