Specification Tables
Summary of Analyzer Specifications and Detection Capabilities
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T-I Max Specification Summary
| Product | Detection and Matrix | Range | LDL (3σ@100s) | Speed of Response @ 20 ppb | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
|---|---|---|---|---|---|---|---|---|
|
T-I Max NH3 Next-Generation AMC Monitor |
NH3 in Cleanroom Air | 0 – 40 ppm | 300 ppt | < 3 minutes | ± 4% or 2x LDL | ± 0.5% or ⅓ LDL | ∼2 slpm | 0 – 10 psig |
| Product | Detection and Matrix | Range | LDL (3σ@100s) | Speed of Response @ 20 ppb | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
|
T-I Max HCl Next-Generation AMC Monitor |
HCl in Cleanroom Air | 0 – 4 ppm | 100 ppt | < 30 seconds | ± 4% or 2x LDL | ± 0.5% or ⅓ LDL | ∼2 slpm | 0 – 10 psig |
| Product | Detection and Matrix | Range | LDL (3σ@100s) | Speed of Response @ 20 ppb | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
|
T-I Max HF Next-Generation AMC Monitor |
HF in Cleanroom Air | 0 – 1 ppm | 20 ppt | < 3 minutes | ± 4% or 2x LDL | ± 0.5% or ⅓ LDL | ∼2 slpm | 0 – 10 psig |
| Product | Model | Range | LDL (3σ) | Precision (1σ) @ zero | Accuracy (greater of) | Precision (greater of) | Flow rate | Pressure |
|
T-I Max CEM Next-Generation CEM analyzer for HCl, HF, NH3 and more |
T-I Max CEM NH3 | 0 – 40 ppm | 6 ppb | 2 ppb | ± 4% or LDL | ± 0.75% or 1/3 LDL | ∼2 slpm | 0 – 10 psig |
| T-I Max CEM HCl | 0 – 4 ppm | 0.75 ppb | 0.25 ppb | |||||
| T-I Max CEM HF | 0 – 1 ppm | 0.15 ppb | 0.05 ppb | |||||
| T-I Max CEM H2S | 0 – 500 ppm | 40 ppb | 13 ppb | |||||
| T-I Max CEM CO | 0 – 2000 ppm | 75 ppb | 25 ppb | |||||
| T-I Max CEM CH4 | 0 – 20 ppm | 1.5 ppb | 0.5 ppb |