Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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T-I Max Specification Summary

Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max NH3
Next-Generation AMC Monitor
NH3 in Cleanroom Air 0 – 40 ppm 300 ppt < 3 minutes ± 4% or 2x LDL ± 0.5% or ⅓ LDL ∼2 slpm 0 – 10 psig
Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max HCl
Next-Generation AMC Monitor
HCl in Cleanroom Air 0 – 4 ppm 100 ppt < 30 seconds ± 4% or 2x LDL ± 0.5% or ⅓ LDL ∼2 slpm 0 – 10 psig
Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max HF
Next-Generation AMC Monitor
HF in Cleanroom Air 0 – 1 ppm 20 ppt < 3 minutes ± 4% or 2x LDL ± 0.5% or ⅓ LDL ∼2 slpm 0 – 10 psig
Product Model Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max CEM
Next-Generation CEM analyzer for HCl, HF, NH3 and more
T-I Max CEM NH3 0 – 40 ppm 6 ppb 2 ppb ± 4% or LDL ± 0.75% or 1/3 LDL ∼2 slpm 0 – 10 psig
T-I Max CEM HCl 0 – 4 ppm 0.75 ppb 0.25 ppb
T-I Max CEM HF 0 – 1 ppm 0.15 ppb 0.05 ppb
T-I Max CEM H2S 0 – 500 ppm 40 ppb 13 ppb
T-I Max CEM CO 0 – 2000 ppm 75 ppb 25 ppb
T-I Max CEM CH4 0 – 20 ppm 1.5 ppb 0.5 ppb