SEMICONDUCTOR & HB-LED
UHP Gas Analysis Beyond Moisture
Tiger Optics’ CRDS gas analyzers have set the industry standard for sub-ppb impurity detection in UHP gases used in semiconductor fabs for many years. In 2013, SEMI F-112 established CRDS as the method of choice for trace moisture analysis, underscoring Tiger’s leadership position for this application.
Today, Tiger Optics also offers analyzers for non-moisture contaminants with similar detection sensitivity, which allows UHP gas manufacturers and users to expand the use of CRDS in their gas quality control procedures and replace older, slower and less sensitive technologies, such as gas chromatography.
The new HALO Max QCL product line, a new generation of Cavity Ring-Down Spectroscopy (CRDS) analyzers based on mid-infrared Quantum Cascade Laser (QCL) technology, enables real-time, parts-per-trillion (ppt) level detection of trace amounts of carbon monoxide (CO) and carbon dioxide (CO2). The HALO KA Max CH4 adds ppt-level detection capability for methane (CH4) to cover all three major light carbon molecules.
Key advantages of Tiger’s CRDS analyzers for UHP Gas Analysis include:
- Industry-best PPT-level analysis for CO, CO2 and CH4 impurities
- Continuous, real-time measurement
- High reliability, low maintenance
- Response time within seconds
- Low cost of ownership
- No calibration requirements
- No carrier gas requirements
- Easy to install, start up and use
Download the following Application Note for more details:
Real-Time ppt-Level Analysis of CO, CO2 and CH4 in Semiconductor UHP Gas