Airborne Molecular Contaminants
The T-I Max series measures trace gases in cleanroom air. Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop. T-I Max analyzers monitor critical AMCs, such as HCl, HF, and NH3, in cleanroom environments and front-opening unified pods (FOUPs) throughout the fab. Tiger's CRDS technique makes measurements easy and is free of interferences from O3 and other contaminants.
Monitors available as:
- Rack-mounted AMC Combo (HCl/HF, HCl/NH3 or HF/NH3)
- AMC Mobile Cart (with up to three analyzers)
Select applications include:
|Monitoring of Cleanroom Air||Front Opening Unified Pods (FOUPs)|