Airborne Molecular Contaminants

Applications

The T-I Max series measures trace gases in cleanroom air. Exposure of wafers to Airborne Molecular Contaminants (AMCs) is a great concern to semiconductor manufacturers, which can cause yields to drop. T-I Max analyzers monitor critical AMCs, such as HCl, HF, and NH3, in cleanroom environments and front-opening unified pods (FOUPs) throughout the fab. Tiger's CRDS technique makes measurements easy and is free of interferences from O3 and other contaminants.

Monitors available as:

  • Standalone
  • Rack-mounted AMC Combo (HCl/HF, HCl/NH3 or HF/NH3)
  • AMC Mobile Cart (with up to three analyzers)

Select applications include:

Monitoring of Cleanroom Air Front Opening Unified Pods (FOUPs)

Related Resources

Next-Generation Monitoring of Airborne Molecular Contaminants in Cleanrooms
Application Notes

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Meeting the needs of EUV lithography
Technical Publications

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