HALO 3 H2O
Trace moisture analyzer for ultra-high-purity gases
The HALO 3 H2O analyzer provides users with the unmatched accuracy, reliability, speed of response and ease of operation that users of Tiger Optics analyzers know and expect. Featuring Tiger Optics’ powerful Cavity Ring-Down Spectroscopy-based moisture sensor in a very compact and economic analyzer design, this versatile analyzer allows users to measure moisture in most inert, corrosive and toxic gases with just one device. Users also enjoy freedom from requirements such as periodic sensor maintenance, span calibrations, purifier replacement and pump rebuilds. As a result, the HALO 3 H2O analyzer is ideally suited to many applications where moisture measurement is extremely critical. These applications include fixed bulk gas continuous quality control, portable mobile analytical carts, process tool monitoring, air separation, gas cylinder quality control and many other demanding applications.
Designed for trace level moisture analysis, the HALO 3 H2O offers:
- Sub parts per billion (ppb) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration gases)
- Wide dynamic range—over four orders of magnitude
- Low cost of ownership and operational simplicity
- Clean technology—no external calibration gases required
- Compact analyzer footprint
- Low gas consumption to conserve rare and costly gas
Applications
| Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| H2O in N2 | 0 – 20 ppm | 1.2 ppb | 0.4 ppb |
| H2O in He | 0 – 4 ppm | 0.25 ppb | 0.1 ppb |
| H2O in Ar | 0 – 9 ppm | 0.6 ppb | 0.2 ppb |
| H2O in H2 | 0 – 16 ppm | 1.0 ppb | 0.4 ppb |
| H2O in D2 (2H2) | 0 – 14 ppm | 0.9 ppb | 0.3 ppb |
| H2O in O2 | 0 – 12 ppm | 0.7 ppb | 0.25 ppb |
| H2O in Clean Dry Air (CDA) | 0 – 18 ppm | 1.2 ppb | 0.4 ppb |
| H2O in CO | 0 – 24 ppm | 1.5 ppb | 0.5 ppb |
| H2O in CO2 (standard range) | 0 – 25 ppm | 2.0 ppb | 0.7 ppb |
| H2O in CO2 (high range) | 0 – 70 ppm | 8 ppb | 3 ppb |
| H2O in SO2 | 0 – 60 ppm | 4 ppb | 1.2 ppb |
| H2O in COS | 0 – 23 ppm | 12 ppb | 4 ppb |
| H2O in Ne | 0 – 5 ppm | 0.3 ppb | 0.1 ppb |
| H2O in Kr | 0 – 11 ppm | 0.6 ppb | 0.2 ppb |
| H2O in Xe | 0 – 13 ppm | 0.8 ppb | 0.3 ppb |
| H2O in Cl2 | 0 – 25 ppm (corrosion-resistant material recommended) | 1.5 ppb | 0.5 ppb |
| H2O in HCl | 0 – 50 ppm (corrosion-resistant material recommended) | 3 ppb | 1.0 ppb |
| H2O in HBr | 0 – 100 ppm (corrosion-resistant material required) | 12 ppb | 4 ppb |
| H2O in SF6 | 0 – 15 ppm | 1.0 ppb | 0.4 ppb |
| H2O in NF3 | 0 – 20 ppm | 2.5 ppb | 0.9 ppb |
| H2O in CF4 | 0 – 15 ppm | 4 ppb | 1.2 ppb |
| H2O in C2F6 | 0 – 15 ppm | 3 ppb | 1.0 ppb |
| H2O in C3F8 | 0 – 20 ppm | 3 ppb | 1.0 ppb |
| H2O in C4F6 | 0 – 25 ppm | 150 ppb | 50 ppb |
| H2O in C4F8 | 0 – 20 ppm | 3 ppb | 1.0 ppb |
| H2O in C5F8 | 0 – 32 ppm | 30 ppb | 10 ppb |
| H2O in H2Se | 0 – 70 ppm | 30 ppb | 10 ppb |
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL, 3σ/24h) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 90% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | 0.05 – 1.8 slpm |
| Sample gases | Most inert, toxic, passive and corrosive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA per sensor |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |