HALO 3 H2O

Trace moisture analyzer for ultra-high-purity gases

Applications

  • Air Separation Units & Nitrogen Plants
  • Gaseous CRMs & Calibration Gas Mixtures
  • High-Purity Gases & Systems
  • Nuclear Energy
  • Research & Development
  • Semiconductor Process Tools
  • Syngas & Fuel Gas Production
Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
H2O in N20 – 20 ppm1.2 ppb0.4 ppb
H2O in He0 – 4 ppm0.25 ppb0.1 ppb
H2O in Ar0 – 9 ppm0.6 ppb0.2 ppb
H2O in H20 – 16 ppm1.0 ppb0.4 ppb
H2O in D2 (2H2)0 – 14 ppm0.9 ppb0.3 ppb
H2O in O20 – 12 ppm0.7 ppb0.25 ppb
H2O in Clean Dry Air (CDA)0 – 18 ppm1.2 ppb0.4 ppb
H2O in CO0 – 24 ppm1.5 ppb0.5 ppb
H2O in CO2 (standard range)0 – 25 ppm2.0 ppb0.7 ppb
H2O in CO2 (high range)0 – 70 ppm8 ppb3 ppb
H2O in SO20 – 60 ppm4 ppb1.2 ppb
H2O in COS0 – 23 ppm12 ppb4 ppb
H2O in Ne0 – 5 ppm0.3 ppb0.1 ppb
H2O in Kr0 – 11 ppm0.6 ppb0.2 ppb
H2O in Xe0 – 13 ppm0.8 ppb0.3 ppb
H2O in Cl20 – 25 ppm
(corrosion-resistant material required)
1.5 ppb0.5 ppb
H2O in HCl0 – 50 ppm
(corrosion-resistant material recommended)
3 ppb1.0 ppb
H2O in HBr0 – 100 ppm
(corrosion-resistant material required)
12 ppb4 ppb
H2O in SF60 – 15 ppm1.0 ppb0.4 ppb
H2O in NF30 – 20 ppm2.5 ppb0.9 ppb
H2O in CF40 – 15 ppm4 ppb1.2 ppb
H2O in C2F60 – 15 ppm3 ppb1.0 ppb
H2O in C3F80 – 20 ppm3 ppb1.0 ppb
H2O in C4F60 – 25 ppm150 ppb50 ppb
H2O in C4F80 – 20 ppm3 ppb1.0 ppb
H2O in C5F80 – 32 ppm30 ppb10 ppb
H2O in H2S0 – 40 ppm200 ppb70 ppb
H2O in H2Se0 – 70 ppm
(Detection in H2Se requires special analyzer
configuration dedicated to service in H2Se.
Contact us for more information.)
30 ppb10 ppb
Performance
Operating range See Detection Capability table
Detection limit (LDL, 3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 90%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate 0.05 – 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
Patents
U.S. Patent #7,277,177  
Title / Description

HALO 3 H2O Brochure (PDF)

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Speed+ Brochure (PDF)

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Moisture Measurement Best Practices Review

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HALO 3 H2O 产品样本 (PDF)

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