QCL-CRDS Analyzer for PPT level CO detection


  • Gas Quality Control
  • High-Purity Gases & Systems
  • Research & Development
  • Semiconductor Process Tools
Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
CO in N20 – 0.5 ppm200 ppt70 ppt
CO in He0 – 0.35 ppm130 ppt45 ppt
CO in Ar0 – 0.4 ppm150 ppt50 ppt
CO in H20 – 0.5 ppm200 ppt70 ppt
CO in O20 – 0.45 ppm170 ppt60 ppt
CO in Clean Dry Air (CDA)0 – 0.5 ppm200 ppt70 ppt
Operating range See Detection Capability table
Detection Limit (LDL) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 6 − 125 psig (1.4 − 9.6 bara)
Flow rate <1 slpm in N2 (gas dependent)
Sample gases Most inert and passive gases
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.75" x 19.0" x 24.0" (222 mm x 483 mm x 610 mm)
Standard sensor 55 lbs (25 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 100 Watts max.
Signal output Isolated 4−20 mA
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
U.S. Patent #7,277,177  
Title / Description

HALO Max QCL 产品样本 (PDF)

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HALO Max QCL Brochure (PDF)

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Real-Time ppt-Level Analysis of CO, CO2 and CH4 in Semiconductor UHP Gas

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