QCL-CRDS Analyzer for PPT level CO2 detection


  • Gas Quality Control
  • High-Purity Gases & Systems
  • Research & Development
  • Semiconductor Process Tools
Detection and Matrix Range LDL* (3σ) Precision (1σ) @ zero
CO2 in N20 – 2.5 ppm100 ppt35 ppt
CO2 in He0 – 2 ppm90 ppt30 ppt
CO2 in Ar0 – 2 ppm80 ppt25 ppt
CO2 in H20 – 4 ppm180 ppt60 ppt
CO2 in O20 – 2 ppm90 ppt30 ppt
CO2 in Clean Dry Air (CDA)0 – 2.5 ppm100 ppt35 ppt
*Due to the high abundance of CO2 in air,
purging of the analyzer housing is required
to achieve specified LDL (see brochure for
purge gas requirements)
Operating range See Detection Capability table
Detection Limit (LDL) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 1 minute to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 6 − 125 psig (1.4 − 9.6 bara)
Flow rate <1 slpm in N2 (gas dependent)
Sample gases Most inert and passive gases
Gas temperature Up to 60°C
Purge gas Inert gas (e.g. N2), <1 ppm CO2, 30 − 150 psig, 4 − 5 slpm
Purge gas connection 1/8" Swagelok®
Dimensions, H x W x D
Standard sensor 8.75" x 19.0" x 24.0" (222 mm x 483 mm x 610 mm)
Standard sensor 60 lbs (27 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 100 Watts max.
Signal output Isolated 4−20 mA
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
U.S. Patent #7,277,177  
Title / Description

Real-Time ppt-Level Analysis of CO, CO2 and CH4 in Semiconductor UHP Gas

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HALO Max QCL Brochure (PDF)

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HALO Max QCL 产品样本 (PDF)

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