Moisture monitor for low-pressure chambers (down to 1 Torr)


  • Gas Quality Control
  • Research & Development
  • Semiconductor Process Tools
  • UHP Ammonia & High-Brightness LEDs
(Matrix independent)
Range LDL (peak-to-peak) Sensitivity (3σ)
H2O0 – 12 mTorrpp
(1200 ppm @ 10 Torr)
1 μTorrpp
(see chart for ppb units)
0.5 μTorrpp
(see chart for ppb units)
Operating range See Detection Capability table
Detection limit (LDL, 24 h peak-to-peak) See Detection Capability table
Sensitivity (3σ) See Detection Capability table
Precision (1σ, greater of) ± 1% or 1/3 of Sensitivity
Accuracy (greater of) ± 5% or 1/2 of LDL
Speed of response 1 to 2 minutes (if not flow-limited)
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions*
Wetted materials 316L stainless steel (corrosive gas version optional), 10 Ra surface finish
Gas connections 1/4" male VCR inlet & outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 1 – 1000 Torr
Outlet pressure <20 mTorr (0.027 mbar)
Sample gases§ N2, H2, HCl, Ar (standard)
  He, Cl2 (optional)
Gas temperature Up to 60°C (in detection cell)
Dimensions, H x W x D
Standard sensor (incl. shutoff valves) 8.73" x 8.57" x 26.4" (222 mm x 218 mm x 670 mm)
Sensor rack (fits up to two sensors) 8.73" x 19.0" x 26.4" (222 mm x 483 mm x 670 mm)
Standard sensor 30 lbs (13.4 kg)
Electrical and Interfaces
Platform Max series analyzer
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485, Modbus TCP (optional)
Data storage Internal or external flash drive
Certification CE Mark
U.S. Patent #7,277,177  
*Vacuum source required  
Pressure requirements for moisture measurement −
for gas purge in standby mode, inlet pressure limit
is 15 psig (1500 Torr)
§HCl and Cl2 sample gases may require corrosive gas
version, please contact us for more information.
Title / Description

HALO QRP Brochure (PDF)

Download file

Moisture Measurement Best Practices Review

Download file

Moisture Monitoring in Low-Temperature Silicon-Germanium Epitaxy

Download file