HALO RP

Trace H2O and HF for sub-atmospheric pressure (as low as 50 Torr)

Applications

  • Gas Quality Control
  • Research & Development
  • Semiconductor Process Tools
  • UHP Ammonia & High-Brightness LEDs
Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
Trace H2O Analyzer (Standard Model)   
H2O in N20 – 20 ppm1.5 ppb0.5 ppb
H2O in Ar0 – 20 ppm1.5 ppb0.5 ppb
H2O in H20 – 20 ppm1.5 ppb0.5 ppb
H2O in He0 – 12 ppm1.0 ppb0.3 ppb
H2O in HCl
(may require corrosive model)
0 – 25 ppm3 ppb1.0 ppb
H2O in PH3
(requires low-leak-rate pump)
0 – 10 ppm9 ppb3 ppb
Trace H2O Analyzer (Arsine Model)   
H2O in AsH3
(requires low-leak-rate pump)
0 – 10 ppm5 ppb2 ppb
H2O in N20 – 6 ppm1.0 ppb0.3 ppb
H2O in He0 – 3 ppm1.0 ppb0.3 ppb
Trace HF Analyzer   
HF in N20 – 10 ppm0.75 ppb0.25 ppb
HF in BF30 – 13 ppm0.9 ppb0.3 ppb
Performance
Operating range See Detection Capability table
Detection limit (LDL, 3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 1% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 3 minutes to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions*
Wetted materials 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4" male VCR inlet & outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 50 torr – 15 psig (0.07 – 2 bara)
Outlet pressure <10 Torr (13 mbar)
Flow rate 0.1 to 1.0 slpm
Sample gases N2, H2, Ar, He, HCl, and others
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor (incl. shutoff valves) 8.73" x 8.57" x 26.4" (222 mm x 218 mm x 670 mm)
Sensor rack (fits up to two sensors) 8.73" x 19.0" x 26.4" (222 mm x 483 mm x 670 mm)
Weight
Standard sensor 30 lbs (13.4 kg)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet, RS-232
  802.11g Wireless (optional), Modbus TCP (optional)
Patents
U.S. Patent #7,277,177  
   
*Vacuum source required  
Title / Description

Moisture Measurement Best Practices Review

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HALO RP Brochure (PDF)

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