T-I Max HF

Next-Generation AMC Monitor


  • Airborne Molecular Contaminants
  • Research & Development
Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb
HF in Cleanroom Air0 – 1 ppm20 ppt< 3 minutes
Operation range See Detection Capability table
Detection limit (LDL, 3σ@100s) See Detection Capability table
Precision (1σ@100s, greater of) ± 0.5% or 1/3 of LDL
Accuracy at span ± 4% of reading
Accuracy at zero ± 20 ppt
Speed of response @ 20 ppb (T10/90+T90/10) See Detection Capability table
Environmental conditions 10°C to 40°C, 10% to 90% RH (non-condensing)
Sample conditions 17°C to 23°C, 35% to 55% RH
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials Optimized for ppt-level AMCs and fast speed of response
Gas connections 1/4" PFA Swagelok® inlet & outlet
Inlet pressure Atmospheric pressure
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼2 slpm @ 1 atm inlet pressure
Sample gases Cleanroom air, clean dry air (CDA) or N2
Gas temperature Up to 60°C
Standard sensor 8.73" x 8.57" x 23.6" (222 mm x 218 mm x 599 mm)
Sensor rack 8.73" x 19.0" x 23.6" (222 mm x 483 mm x 599 mm)
GO-cart 50" x 23" x 36" (1270 mm x 584 mm x 914 mm)
Standard sensor 33 lbs (15 kg)
GO-cart 260 lbs (118 kg)
(excl. vacuum pump)  
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7" LCD touchscreen, 10/100 Base-T Ethernet
  USB, RS-232, RS-485
Data storage Internal or external flash drive
U.S. Patent # 7,277,177  
*Vacuum source with >2 slpm @ 10 Torr required  
Contact us for details about operating the analyzer
at elevated inlet pressure.
Title / Description

GO-cart AMC Cart Brochure (PDF)

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T-I Max HF, HCl and NH3 for AMC Brochure (PDF)

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Next-Generation Monitoring of Airborne Molecular Contaminants in Cleanrooms

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