Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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HALO Specification Summary

Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO Max QCL CO
QCL-CRDS Analyzer for PPT level CO detection
CO in N2 0 – 0.5 ppm 200 ppt 70 ppt ± 4% or LDL ± 0.75% or ⅓ LDL <1 slpm in N2 (gas dependent) 6 – 125 psig
CO in He 0 – 0.35 ppm 130 ppt 45 ppt
CO in Ar 0 – 0.4 ppm 150 ppt 50 ppt
CO in H2 0 – 0.5 ppm 200 ppt 70 ppt
CO in O2 0 – 0.45 ppm 170 ppt 60 ppt
CO in Clean Dry Air (CDA) 0 – 0.5 ppm 200 ppt 70 ppt
Product Detection and Matrix Range LDL* (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO Max QCL CO2
QCL-CRDS Analyzer for PPT level CO2 detection
CO2 in N2 0 – 2.5 ppm 100 ppt 35 ppt ± 4% or LDL ± 0.75% or ⅓ LDL <1 slpm in N2 (gas dependent) 6 – 125 psig
CO2 in He 0 – 2 ppm 90 ppt 30 ppt
CO2 in Ar 0 – 2 ppm 80 ppt 25 ppt
CO2 in O2 0 – 2 ppm 90 ppt 30 ppt
CO2 in Clean Dry Air (CDA) 0 – 2.5 ppm 100 ppt 35 ppt
*Due to the high abundance of CO2 in air,
purging of the analyzer housing is required
to achieve specified LDL (see brochure for
purge gas requirements)
     
Product Detection and Matrix Range LDL* Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA Max H2O
Ultimate part-per-trillion moisture detection
H2O in N2 0 – 5 ppm 100 ppt 40 ppt ± 4% or LDL ± 0.75% or ⅓ LDL ∼2 slpm in N2 (gas dependent) 10 – 125 psig
H2O in He 0 – 1 ppm 100 ppt 10 ppt
H2O in Ar 0 – 2 ppm 100 ppt 20 ppt
H2O in H2 0 – 4 ppm 100 ppt 30 ppt
H2O in O2 0 – 2.5 ppm 100 ppt 20 ppt
H2O in Clean Dry Air (CDA) 0 – 4 ppm 100 ppt 30 ppt
*The Detection limit (LDL) is defined as 3σ over 24h
or the H2O drydown limit, whichever is higher.
     
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO OK
Trace oxygen detection as low as 50 ppt
Standard Model
(using pure H2 utility gas)
      ± 4% or LDL ± 0.75% or ⅓ LDL 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig (sample)
20 – 125 psig (H2 supply)
O2 in He 0 – 0.5 ppm 50 ppt 17 ppt
O2 in Ar 0 – 1 ppm 90 ppt 30 ppt
O2 in H2 0 – 2 ppm 150 ppt 50 ppt
O2 in N2 0 – 2.5 ppm 200 ppt 70 ppt
CO2 Model
(using pure H2 utility gas)
     
O2 in He 0 – 0.5 ppm 50 ppt 17 ppt
O2 in Ar 0 – 1 ppm 90 ppt 30 ppt
O2 in H2 0 – 2 ppm 150 ppt 50 ppt
O2 in N2 0 – 2.5 ppm 200 ppt 70 ppt
O2 in CO2 0 – 5 ppm 5000 ppt/1000 ppt§ 300 ppt
Enhanced Safety Model
(using 3% H2/97% N2
mixture utility gas)
     
O2 in He 0 – 0.5 ppm 400 ppt 17 ppt
O2 in Ar 0 – 1 ppm 400 ppt 30 ppt
O2 in H2 0 – 2 ppm 400 ppt 50 ppt
O2 in N2 0 – 2.5 ppm 400 ppt 70 ppt
LDL is dependent upon the
quality of the sample gas
and the integrity of
the sampling system.
     
LDL is limited by minimum
achievable O2 concentration,
not by 3σ baseline noise.
     
§LDL of 1000 ppt requires addition
of Tiger Optics’ Zero Gas Panel
and Linear Fit Mode. Please
contact us for more information.
     
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA Max NH3
ppt-level ammonia detection in bulk gases
NH3 in N2 0 – 7 ppm 100 ppt 40 ppt ± 4% or LDL ± 0.75% or ⅓ LDL ∼2 slpm in N2 (gas dependent) 10 – 125 psig
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA Max CH4
Sub-ppb methane detection in bulk gases
CH4 in N2 0 – 8 ppm 500 ppt 200 ppt ± 4% or LDL ± 0.75% or ⅓ LDL ∼2 slpm in N2 (gas dependent) 10 – 125 psig
CH4 in He 0 – 5 ppm 400 ppt 140 ppt
CH4 in Ar 0 – 7 ppm 450 ppt 150 ppt
CH4 in H2 0 – 8 ppm 500 ppt 200 ppt
CH4 in O2 0 – 7 ppm 500 ppt 200 ppt
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA H2O
Part-per-trillion detection limits for H2O

H2O in N2 0 – 20 ppm 300 ppt 100 ppt ± 4% or LDL ± 0.75% or ⅓ LDL 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 100 ppt 20 ppt
H2O in Ar 0 – 9 ppm 130 ppt 45 ppt
H2O in H2 0 – 16 ppm 200 ppt 70 ppt
H2O in D2 (2H2) 0 – 14 ppm 900 ppt 300 ppt
H2O in O2 0 – 10 ppm 150 ppt 50 ppt
H2O in Clean Dry Air (CDA) 0 – 18 ppm 300 ppt 100 ppt
H2O in CO 0 – 24 ppm 600 ppt 200 ppt
H2O in CO2 0 – 25 ppm 800 ppt 300 ppt
H2O in 1% GeH4/99% H2 0 – 16 ppm 7 ppb 2.5 ppb
H2O in 10% GeH4/90% H2 0 – 16 ppm 35 ppb 12 ppb
H2O in COS 0 – 23 ppm 4 ppb 1.4 ppb
H2O in Ne 0 – 5 ppm 100 ppt 30 ppt
H2O in Kr 0 – 11 ppm 160 ppt 60 ppt
H2O in Xe 0 – 13 ppm 250 ppt 90 ppt
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material required)
650 ppt 220 ppt
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
1200 ppt 400 ppt
H2O in HBr 0 – 50 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 400 ppt 140 ppt
H2O in NF3 0 – 20 ppm 600 ppt 200 ppt
H2O in CF4 0 – 15 ppm 800 ppt 300 ppt
H2O in C2F6 0 – 15 ppm 1200 ppt 400 ppt
H2O in C3F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C4F6 0 – 25 ppm 150 ppb 50 ppb
H2O in C4F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C5F8 0 – 32 ppm 8 ppb 3 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 H2O
Trace moisture analyzer for ultra-high-purity gases

H2O in N2 0 – 20 ppm 1.2 ppb 0.4 ppb ± 4% or LDL ± 0.75% or ⅓ LDL 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 0.25 ppb 0.1 ppb
H2O in Ar 0 – 9 ppm 0.6 ppb 0.2 ppb
H2O in H2 0 – 16 ppm 1.0 ppb 0.4 ppb
H2O in D2 (2H2) 0 – 14 ppm 0.9 ppb 0.3 ppb
H2O in O2 0 – 12 ppm 0.7 ppb 0.25 ppb
H2O in Clean Dry Air (CDA) 0 – 18 ppm 1.2 ppb 0.4 ppb
H2O in CO 0 – 24 ppm 1.5 ppb 0.5 ppb
H2O in CO2 (standard range) 0 – 25 ppm 2.0 ppb 0.7 ppb
H2O in CO2 (high range) 0 – 70 ppm 8 ppb 3 ppb
H2O in SO2 0 – 60 ppm 4 ppb 1.2 ppb
H2O in COS 0 – 23 ppm 12 ppb 4 ppb
H2O in Ne 0 – 5 ppm 0.3 ppb 0.1 ppb
H2O in Kr 0 – 11 ppm 0.6 ppb 0.2 ppb
H2O in Xe 0 – 13 ppm 0.8 ppb 0.3 ppb
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material required)
1.5 ppb 0.5 ppb
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
3 ppb 1.0 ppb
H2O in HBr 0 – 100 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 1.0 ppb 0.4 ppb
H2O in NF3 0 – 20 ppm 2.5 ppb 0.9 ppb
H2O in CF4 0 – 15 ppm 4 ppb 1.2 ppb
H2O in C2F6 0 – 15 ppm 3 ppb 1.0 ppb
H2O in C3F8 0 – 20 ppm 3 ppb 1.0 ppb
H2O in C4F6 0 – 25 ppm 150 ppb 50 ppb
H2O in C4F8 0 – 20 ppm 3 ppb 1.0 ppb
H2O in C5F8 0 – 32 ppm 30 ppb 10 ppb
H2O in H2S 0 – 40 ppm 200 ppb 70 ppb
H2O in H2Se 0 – 70 ppm
(Detection in H2Se requires special analyzer
configuration dedicated to service in H2Se.
Contact us for more information.)
30 ppb 10 ppb
H2O in 1% GeH4/99% H2 0 – 16 ppm 7 ppb 2.5 ppb
H2O in 10% GeH4/90% H2 0 – 16 ppm 35 ppb 12 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO
Trace-level carbon monoxide detection

CO in N2 0 – 2000 ppm 40 ppb 15 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
CO in O2 0 – 1800 ppm 35 ppb 12 ppb
CO in Clean Dry Air (CDA) 0 – 2000 ppm 40 ppb 15 ppb
CO in Ar 0 – 1600 ppm 30 ppb 10 ppb
CO in He 0 – 1800 ppm 35 ppb 12 ppb
CO in H2 0 – 2500 ppm 50 ppb 20 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO2
Part-per-billion carbon dioxide detection
CO2 in N2 (low range) 0 – 12 ppm 8 ppb 3 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
CO2 in N2 (high range) 0 – 1500 ppm 250 ppb 100 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH4
Trace methane analyzer for high-purity gases

CH4 in N2 0 – 8 ppm 1.6 ppb 0.6 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
CH4 in He 0 – 5 ppm 1.1 ppb 0.4 ppb
CH4 in Ar 0 – 7 ppm 1.4 ppb 0.5 ppb
CH4 in H2 0 – 8 ppm 1.6 ppb 0.6 ppb
CH4 in O2 0 – 6 ppm 1.1 ppb 0.4 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HF
Trace hydrogen fluoride in pressurized gases

HF in N2 0 – 5 ppm 0.4 ppb 0.15 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
HF in He 0 – 1.3 ppm 0.4 ppb 0.05 ppb
HF in SF6 0 – 8 ppm 1.2 ppb 0.4 ppb
HF in NF3 0 – 7.5 ppm 0.6 ppb 0.2 ppb
HF in CF4 0 – 6 ppm 0.8 ppb 0.3 ppb
HF in C2F6 0 – 12 ppm 1.6 ppb 0.6 ppb
HF in C3F8 0 – 12 ppm 1.6 ppb 0.6 ppb
HF in C4F6 0 – 15 ppm 15 ppb 5 ppb
HF in C4F8 0 – 14 ppm 1.6 ppb 0.6 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HCl
Trace hydrogen chloride
HCl in N2 0 – 20 ppm 1.0 ppb 0.4 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
HCl in Clean Dry Air (CDA) 0 – 20 ppm 1.0 ppb 0.4 ppb
HCl in H2 0 – 10 ppm 1.0 ppb 0.4 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO LP H2O
Trace moisture in hydride gases
Standard Model       ± 4% or LDL ± 1% or 1/3 of LDL up to 1.0 slpm 10 – 125 psig
H2O in NH3 0 – 20 ppm 9 ppb 3 ppb
H2O in PH3 0 – 10 ppm 9 ppb 3 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in Ar 0 – 4 ppm 0.8 ppb 0.25 ppb
H2O in H2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 0.6 ppb 0.2 ppb
H2O in NO 0 – 100 ppm 16 ppb 6 ppb
H2O in GeH4 0 – 18 ppm 20 ppb 7 ppb
Arsine Model      
H2O in AsH3 0 – 10 ppm 5 ppb 2 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in Ar 0 – 4 ppm 1.0 ppb 0.3 ppb
H2O in H2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.3 ppb
Low leak rate vacuum pump (safety certified
for service in relevant gas) required
     
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO RP
Trace H2O and HF for sub-atmospheric pressure (as low as 50 Torr)
Trace H2O Analyzer (Standard Model)       ± 4% or LDL ± 1% or ⅓ LDL 0.1 to 1.0 slpm 50 Torr – 15 psig
H2O in N2 0 – 20 ppm 1.5 ppb 0.5 ppb
H2O in Ar 0 – 20 ppm 1.5 ppb 0.5 ppb
H2O in H2 0 – 20 ppm 1.5 ppb 0.5 ppb
H2O in He 0 – 12 ppm 1.0 ppb 0.3 ppb
H2O in HCl†,‡ 0 – 25 ppm 3 ppb 1.0 ppb
H2O in CO 0 – 20 ppm 2 ppb 0.7 ppb
H2O in PH3 0 – 10 ppm 9 ppb 3 ppb
H2O in GeH4 0 – 18 ppm 20 ppb 7 ppb
Trace H2O Analyzer (Arsine Model)      
H2O in AsH3 0 – 10 ppm 5 ppb 2 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.3 ppb
Trace HF Analyzer      
HF in N2 0 – 10 ppm 0.75 ppb 0.25 ppb
HF in BF3 0 – 13 ppm 0.9 ppb 0.3 ppb
May require corrosive gas version,
please contact us for more information
     
Low leak rate vacuum pump (safety certified
for service in relevant gas) required
     
Product Detection
(Matrix independent)
Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO QRP
Moisture monitor for low-pressure chambers (down to 1 Torr)
H2O 0 – 12 mTorrpp
(1200 ppm @ 10 Torr)
1 μTorrpp
(see chart for ppb units)
0.5 μTorrpp
(see chart for ppb units)
± 5% or ½ LDL ± 1% or ⅓ Sensitivity N/A 1 Torr – 1000 Torr
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2
ppb-level hydrogen detection
Standard Model
(requires 1% O2, 99% N2 mixture
or CDA utility gas)
      ± 4% or LDL ± 0.75% or ⅓ LDL 0.5 slpm (± 20%) 10 – 125 psig (sample)
20 – 125 psig (utility gas)
H2 in N2 0 – 500 ppm 8 ppb 3 ppb
H2 in Ar 0 – 200 ppm 6 ppb 2.0 ppb
H2 in He 0 – 125 ppm 4 ppb 1.5 ppb
H2 in Ne 0 – 140 ppm 4 ppb 1.5 ppb
CDA Model
(requires pure N2 utility gas)
     
H2 in Clean Dry Air (CDA) 0 – 5000 ppm 80 ppb 30 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 NH3
Trace-level ammonia
Standard Model       ± 4% or LDL ± 0.75% or ⅓ LDL ∼1 slpm 10 – 125 psig
NH3 in N2 (Low Range) 0 – 7 ppm 0.5 ppb 0.2 ppb
NH3 in N2 (Mid Range) 0 – 35 ppm 2.5 ppb 0.8 ppb
NH3 in N2 (High Range) 0 – 130 ppm 20 ppb 7 ppb
NH3 in H2 (Low Range) 0 – 6 ppm 0.4 ppb 0.15 ppb
NH3 in H2 (Mid Range) 0 – 30 ppm 2.0 ppb 0.7 ppb
NH3 in H2 (High Range) 0 – 110 ppm 15 ppb 5 ppb
NH3 in CO2 0 – 30 ppm 2.5 ppb 0.8 ppb
N2O Model      
NH3 in N2 0 – 150 ppm 9 ppb 3 ppb
NH3 in N2O 0 – 200 ppm 10 ppb / 50 ppb 3.5 ppb / 20 ppb
Cannot be combined with Low or High Range
detection in N2/H2
Dry vacuum pump required
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH2O
Trace-level formaldehyde
CH2O in N2 0 – 40 ppm 5 ppb 1.7 ppb ± 4% or LDL ± 0.75% or ⅓ LDL <1 slpm 10 – 125 psig
CH2O in H2 0 – 40 ppm 6 ppb 2.0 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2O in N2O
Trace moisture analyzer for pure nitrous oxide
H2O in N2 0 – 15 ppm 2.2 ppb 0.8 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
H2O in N2O 0 – 20 ppm 7.5 ppb 2.5 ppb
H2O in Ar 0 – 6 ppm 1.0 ppb 0.35 ppb
H2O in He 0 – 3 ppm 0.5 ppb 0.2 ppb
H2O in H2 0 – 12 ppm 1.9 ppb 0.7 ppb
H2O in O2 0 – 8 ppm 1.2 ppb 0.4 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 D2O/HDO
Trace-level heavy water analyzer
D2O in D2 0 – 20 ppm 3 ppb 1.0 ppb ± 4% or LDL ± 0.75% or 1/3 of LDL 0.05 to 1.8 slpm 10 – 125 psig
D2O in N2 0 – 50 ppm 7 ppb 2.5 ppb
HDO in D2 0 – 30 ppm 5 ppb 2 ppb
HDO in N2 0 – 40 ppm 6 ppb 2 ppb