Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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HALO Specification Summary

Product Detection and Matrix Range LDL* Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA Max
Part-per-trillion detection limits for H2O

H2O in N2 0 – 5 ppm 100 ppt 40 ppt ± 4% or LDL ± 0.75% or ⅓ LDL ∼2 slpm in N2 (gas dependent) 10 – 125 psig
H2O in He 0 – 1 ppm 100 ppt 10 ppt
H2O in Ar 0 – 2 ppm 100 ppt 20 ppt
H2O in H2 0 – 4 ppm 100 ppt 30 ppt
H2O in O2 0 – 2.5 ppm 100 ppt 20 ppt
H2O in CDA 0 – 4 ppm 100 ppt 30 ppt
*The Detection limit (LDL) is defined as 3σ over 24h
or the H2O drydown limit, whichever is higher
     
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO KA H2O
Part-per-trillion detection limits for H2O

H2O in N2 0 – 20 ppm 300 ppt 100 ppt ± 4% or LDL ± 0.75% or ⅓ LDL 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 100 ppt 20 ppt
H2O in Ar 0 – 9 ppm 130 ppt 45 ppt
H2O in H2 0 – 16 ppm 200 ppt 70 ppt
H2O in O2 0 – 10 ppm 150 ppt 50 ppt
H2O in Clean Dry Air (CDA) 0 – 18 ppm 300 ppt 100 ppt
H2O in CO 0 – 24 ppm 600 ppt 200 ppt
H2O in CO2 0 – 25 ppm 800 ppt 300 ppt
H2O in 1% GeH4/99% H2 0 – 16 ppm 7 ppb 2.5 ppb
H2O in 10% GeH4/90% H2 0 – 16 ppm 35 ppb 12 ppb
H2O in COS 0 – 23 ppm 4 ppb 1.4 ppb
H2O in Ne 0 – 5 ppm 100 ppt 30 ppt
H2O in Kr 0 – 11 ppm 160 ppt 60 ppt
H2O in Xe 0 – 13 ppm 250 ppt 90 ppt
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
650 ppt 220 ppt
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
1200 ppt 400 ppt
H2O in HBr 0 – 50 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 400 ppt 140 ppt
H2O in NF3 0 – 20 ppm 600 ppt 200 ppt
H2O in CF4 0 – 15 ppm 800 ppt 300 ppt
H2O in C2F6 0 – 15 ppm 1200 ppt 400 ppt
H2O in C3F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C4F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C5F8 0 – 32 ppm 8 ppb 3 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 H2O
Trace moisture analyzer for ultra-high-purity gases

H2O in N2 0 – 20 ppm 1.2 ppb 0.4 ppb ± 4% or LDL ± 0.75% or ⅓ LDL 0.05 – 1.8 slpm 10 – 125 psig
H2O in He 0 – 4 ppm 0.25 ppb 0.1 ppb
H2O in Ar 0 – 9 ppm 0.6 ppb 0.2 ppb
H2O in H2 0 – 16 ppm 1.0 ppb 0.4 ppb
H2O in O2 0 – 12 ppm 0.7 ppb 0.25 ppb
H2O in Clean Dry Air (CDA) 0 – 18 ppm 1.2 ppb 0.4 ppb
H2O in CO 0 – 24 ppm 1.5 ppb 0.5 ppb
H2O in CO2 (low range) 0 – 25 ppm 2.0 ppb 0.7 ppb
H2O in CO2 (high range) 0 – 70 ppm 8 ppb 3 ppb
H2O in COS 0 – 23 ppm 12 ppb 4 ppb
H2O in Ne 0 – 5 ppm 0.3 ppb 0.1 ppb
H2O in Kr 0 – 11 ppm 0.6 ppb 0.2 ppb
H2O in Xe 0 – 13 ppm 0.8 ppb 0.3 ppb
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
1.5 ppb 0.5 ppb
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
3 ppb 1.0 ppb
H2O in HBr 0 – 100 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 1.0 ppb 0.4 ppb
H2O in NF3 0 – 20 ppm 2.5 ppb 0.9 ppb
H2O in CF4 0 – 15 ppm 4 ppb 1.2 ppb
H2O in C2F6 0 – 15 ppm 3 ppb 1.0 ppb
H2O in C3F8 0 – 20 ppm 3 ppb 1.0 ppb
H2O in C4F6 0 – 25 ppm 150 ppb 50 ppb
H2O in C4F8 0 – 20 ppm 3 ppb 1.0 ppb
H2O in C5F8 0 – 32 ppm 30 ppb 10 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CO2
Part-per-billion carbon dioxide detection
CO2 in N2 (low range) 0 – 12 ppm 8 ppb 3 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
CO2 in N2 (high range) 0 – 1500 ppm 250 ppb 100 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH4
Trace methane analyzer for high-purity gases

CH4 in N2 0 – 8 ppm 1.6 ppb 0.6 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 30 – 125 psig
CH4 in He 0 – 5 ppm 1.1 ppb 0.4 ppb
CH4 in Ar 0 – 7 ppm 1.4 ppb 0.5 ppb
CH4 in H2 0 – 8 ppm 1.6 ppb 0.6 ppb
CH4 in O2 0 – 6 ppm 1.1 ppb 0.4 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HF
Trace hydrogen fluoride in pressurized gases

HF in N2 0 – 5 ppm 0.4 ppb 0.15 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
HF in He 0 – 1.3 ppm 0.4 ppb 0.05 ppb
HF in SF6 0 – 8 ppm 1.2 ppb 0.4 ppb
HF in NF3 0 – 7.5 ppm 0.6 ppb 0.2 ppb
HF in CF4 0 – 6 ppm 0.8 ppb 0.3 ppb
HF in C2F6 0 – 12 ppm 1.6 ppb 0.6 ppb
HF in C3F8 0 – 12 ppm 1.6 ppb 0.6 ppb
HF in C4F6 0 – 15 ppm 15 ppb 5 ppb
HF in C4F8 0 – 14 ppm 1.6 ppb 0.6 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 HCl
Trace hydrogen chloride
HCl in N2 0 – 13 ppm 1.7 ppb* 0.6 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
HCl in Clean Dry Air (CDA) 0 – 13 ppm 1.7 ppb* 0.6 ppb
*with <2000ppm H2O in sample gas
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO LP H2O
Trace moisture in hydride gases
Standard Model       ± 4% or LDL ± 1% or 1/3 of LDL up to 1.0 slpm 10 – 125 psig
H2O in NH3 0 – 20 ppm 9 ppb 3 ppb
H2O in PH3 0 – 10 ppm 9 ppb 3 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in Ar 0 – 4 ppm 1.0 ppb 0.3 ppb
H2O in H2 0 – 6 ppm 0.8 ppb 0.25 ppb
H2O in He 0 – 3 ppm 0.8 ppb 0.25 ppb
H2O in NO 0 – 100 ppm 16 ppb 6 ppb
Arsine Model      
H2O in AsH3 0 – 10 ppm 5 ppb 2 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in Ar 0 – 4 ppm 1.0 ppb 0.3 ppb
H2O in H2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.3 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO RP
Trace H2O and HF for sub-atmospheric pressure (as low as 50 Torr)
Trace H2O Analyzer (Standard Model)       ± 4% or LDL ± 1% or ⅓ LDL 0.1 to 1.0 slpm 50 Torr – 15 psig
H2O in N2 0 – 20 ppm 1.5 ppb 0.5 ppb
H2O in Ar 0 – 20 ppm 1.5 ppb 0.5 ppb
H2O in H2 0 – 20 ppm 1.5 ppb 0.5 ppb
H2O in He 0 – 12 ppm 1.0 ppb 0.3 ppb
H2O in HCl
(may require corrosive model)
0 – 25 ppm 3 ppb 1.0 ppb
H2O in PH3
(requires low-leak-rate pump)
0 – 10 ppm 9 ppb 3 ppb
Trace H2O Analyzer (Arsine Model)      
H2O in AsH3
(requires low-leak-rate pump)
0 – 10 ppm 5 ppb 2 ppb
H2O in N2 0 – 6 ppm 1.0 ppb 0.3 ppb
H2O in He 0 – 3 ppm 1.0 ppb 0.3 ppb
Trace HF Analyzer      
HF in N2 0 – 10 ppm 0.75 ppb 0.25 ppb
HF in BF3 0 – 13 ppm 0.9 ppb 0.3 ppb
Product Detection
(Matrix independent)
Range LDL (peak-to-peak) Sensitivity (3σ) Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO QRP
Moisture monitor for low-pressure chambers (down to 1 Torr)
H2O 0 – 12 mTorrpp
(1200 ppm @ 10 Torr)
1 μTorrpp
(see chart for ppb units)
0.5 μTorrpp
(see chart for ppb units)
± 5% or ½ LDL ± 1% or ⅓ Sensitivity N/A 1 Torr – 1000 Torr
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2
ppb-level hydrogen detection
H2 in N2 0 – 500 ppm 8 ppb 3 ppb ± 4% or LDL ± 0.75% or ⅓ LDL 0.5 slpm (± 20%) 10 – 125 psig (sample)
20 – 125 psig (Utility gas)
H2 in Ar 0 – 200 ppm 6 ppb 2.0 ppb
H2 in He 0 – 125 ppm 4 ppb 1.5 ppb
H2 in Clean Dry Air (CDA) 0 – 450 ppm 20 ppb
(dry-down limited)
2.5 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 NH3
Trace-level ammonia
Standard Model       ± 4% or LDL ± 0.75% or ⅓ LDL ∼1 slpm 10 – 125 psig
NH3 in N2 (Low Range) 0 – 7 ppm 0.4 ppb 0.15 ppb
NH3 in N2 (Mid Range) 0 – 35 ppm 2.5 ppb 0.8 ppb
NH3 in N2 (High Range) 0 – 130 ppm 9 ppb 3 ppb
NH3 in H2 (Low Range) 0 – 6 ppm 0.3 ppb 0.10 ppb
NH3 in H2 (Mid Range) 0 – 30 ppm 2.0 ppb 0.7 ppb
NH3 in H2 (High Range) 0 – 110 ppm 7 ppb 2.5 ppb
NH3 in CO2 0 – 30 ppm 2.5 ppb 0.8 ppb
N2O Model      
NH3 in N2 0 – 150 ppm 7 ppb 2.5 ppb
NH3 in N2O 0 – 200 ppm 8 ppb / 40 ppb 3 ppb / 15 ppb
Dry vacuum pump required
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO 3 CH2O
Trace-level formaldehyde
CH2O in N2 0 – 40 ppm 5 ppb 1.7 ppb ± 4% or LDL ± 0.75% or ⅓ LDL <1 slpm 10 – 125 psig
CH2O in H2 0 – 40 ppm 6 ppb 2.0 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO H2O in N2O
Trace moisture analyzer for pure nitrous oxide
H2O in N2 0 – 20 ppm 2.2 ppb 0.8 ppb ± 4% or LDL ± 0.75% or ⅓ LDL up to 1.8 slpm 10 – 125 psig
H2O in N2O 0 – 20 ppm 7.5 ppb 2.5 ppb
H2O in Ar 0 – 6 ppm 1.0 ppb 0.35 ppb
H2O in He 0 – 3 ppm 0.5 ppb 0.2 ppb
H2O in H2 0 – 12 ppm 1.9 ppb 0.7 ppb
H2O in O2 0 – 8 ppm 1.2 ppb 0.4 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
HALO OK
Trace oxygen detection as low as 50 ppt
O2 in He 0 – 0.5 ppm 50 ppt 17 ppt ± 4% or LDL ± 0.75% or ⅓ LDL 0.5 – 1.8 slpm
(gas dependent)
10 – 125 psig (sample)
20 – 125 psig (H2 supply)
O2 in Ar 0 – 1 ppm 90 ppt 30 ppt
O2 in H2 0 – 2 ppm 150 ppt 50 ppt
O2 in N2 0 – 2.5 ppm 200 ppt 70 ppt
O2 in CO2§ 0 – 5 ppm 5000 ppt 300 ppt
§Special configuration required,
must be specified at time of order.