Specification Tables

Summary of Analyzer Specifications and Detection Capabilities

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T-I Max Specification Summary

Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max NH3
Next-Generation AMC Monitor
NH3 in Cleanroom Air 0 – 40 ppm 300 ppt < 3 minutes ± 4% or 300 ppt (greater of) ± 0.5% or ⅓ LDL ∼3 slpm Atmospheric pressure
Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max HCl
Next-Generation AMC Monitor
HCl in Cleanroom Air 0 – 4 ppm 100 ppt < 30 seconds ± 4% or 100 ppt (greater of) ± 0.5% or ⅓ LDL ∼2 slpm Atmospheric pressure
Product Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max HF
Next-Generation AMC Monitor
HF in Cleanroom Air 0 – 1 ppm 20 ppt < 3 minutes ± 4% or 20 ppt (greater of) ± 0.5% or ⅓ LDL ∼2 slpm Atmospheric pressure
Product Model Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max CEM
Next-Generation CEM analyzer for HCl, HF, NH3 and more
T-I Max CEM NH3 0 – 40 ppm 6 ppb 2 ppb ± 4% or LDL ± 0.75% or 1/3 LDL ∼2 slpm 0 – 10 psig
T-I Max CEM HCl 0 – 4 ppm 0.75 ppb 0.25 ppb
T-I Max CEM HF 0 – 1 ppm 0.15 ppb 0.05 ppb
T-I Max CEM H2S 0 – 500 ppm 40 ppb 13 ppb
T-I Max CEM CH4 0 – 20 ppm 1.5 ppb 0.5 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max AIR CH2O
Trace formaldehyde in ambient air
CH2O in Ambient Air 0 – 100 ppm 10 ppb 3.5 ppb ± 4% or LDL ± 0.75% or 1/3 LDL ∼2 slpm max. 0 – 10 psig
CH2O in N2 0 – 100 ppm 10 ppb 3.5 ppb
CH2O in Clean Dry Air (CDA) 0 – 100 ppm 10 ppb 3.5 ppb
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max AIR CO2
CO2 analyzer for greenhouse gas monitoring
CO2 in Clean Dry Air (CDA) 0 – 3000 ppm 150 ppb 50 ppb ± 4% or the LDL
(∼16 ppm at ambient CO2 levels)
± 0.75% or ⅓ LDL
(∼3 ppm at ambient CO2 levels)
∼1 slpm 0 – 15 psig
CO2 in N2 0 – 3000 ppm 150 ppb 50 ppb
CO2 in Ambient Air 0 – 1500 ppm N/A N/A
Product Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero Accuracy (greater of) Precision (greater of) Flow rate Pressure
T-I Max AIR CH4
CH4 analyzer for greenhouse gas monitoring
Low-Range Model       ± 4% or the LDL
(∼80 ppb at ambient CH4 levels)
± 0.75% or ⅓ LDL
(∼15 ppb at ambient CH4 levels)
∼1 slpm 0 – 15 psig
CH4 in Clean Dry Air (CDA) 0 – 25 ppm 1.5 ppb 0.5 ppb
CH4 in N2 0 – 25 ppm 1.5 ppb 0.5 ppb
CH4 in Ambient Air 0 – 25 ppm N/A N/A
High-Range Model      
CH4 in Clean Dry Air (CDA) 0 – 100 ppm 7.5 ppb 2.5 ppb
CH4 in N2 0 – 100 ppm 7.5 ppb 2.5 ppb
CH4 in Ambient Air 0 – 100 ppm N/A N/A
Upper range available as high as 1000 ppm on request